Rotary air-bearing stage assists wafer inspection

ABRT series rotary air-bearing stages provide 360˚ continuous travel with resolution to 0.027 arc sec. Payload capacity is up to 69 kg. The stages are designed to meet requirements of wafer inspection, metrology applications, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology-device fabrication. The ABRT series utilizes versions of the company's S-series slotless, brushless motor to maximize positioning performance.

ABRT series rotary air-bearing stages provide 360˚ continuous travel with resolution to 0.027 arc sec. Payload capacity is up to 69 kg. The stages are designed to meet requirements of wafer inspection, metrology applications, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology-device fabrication. The ABRT series utilizes versions of the company's S-series slotless, brushless motor to maximize positioning performance.
Aerotech
Pittsburgh, PA, USA
www.aerotech.com

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