UV camera evaluates optical coatings

FEBRUARY 7--Sarnoff Corporation (Princeton, NJ; www.sarnoff.com) has developed a 14-bit back-illuminated CCD ultraviolet camera module with a 100% fill factor for use in applications such as evaluating optical coatings and developing subsystems for deep submicron-IC-inspection equipment. The camera features sensitivity in the 157- to 351-nm excimer range, has a resolution of 1024 x 1024 pixels, and has frame rates up to 100 frames/s.

One version of the camera is currently used to give semiconductor inspection equipment the ability to image feature sizes that are impossible to see with visible light. Sarnoff is now marketing the module as a separate product for other uses.