Linear motor stage provides sub-nanometer resolution

OCTOBER 3, 2008--The ALS130H linear motor stage, with sub-nanometer (0.5 nm) resolution, employs a center-driven, non-cogging linear motor as the driving element.

OCTOBER 3, 2008--The ALS130H linear motor stage, with sub-nanometer (0.5 nm) resolution, employs a center-driven, non-cogging linear motor as the driving element. With the direct-drive device there is no backlash, windup, or "stiction" associated with lead screw or ball-screw drives. Moving magnet track design eliminates the need for cable management. The compact linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s, allowing precise, small-resolution steps for alignment applications where step accuracy is critical. Straightness and flatness for the standard ALS130H is <+/-2 µm over the entire travel.
Aerotech
Pittsburgh, PA, USA
www.aerotech.com

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PRESS RELEASE

ALS130H Series Linear Motor Stage Provides Outstanding Step-to-Step Resolution for High Precision Alignment

* Bi-directional repeatability to 75 nm
* Direct-drive linear motor for ultra-precise motion
* 23 N (5.2 lb) continuous force linear servomotor
* High-accuracy, noncontact, glass-scale linear encoder
* Anti-cage creep cross-roller bearings for smooth motion
* Outstanding performance in a small footprint

The ALS130H, with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications. The ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" normally associated with a lead screw or ball-screw drive. The moving magnet track design eliminates the need for cable management and further improves long-term reliability.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Exceptional Resolution
Outstanding step-to-step resolution is critical for alignment applications. The ALS130H meets this demand with a resolution of 0.5 nm. The direct-drive linear motor allows the ALS130H to make precise, small resolution steps, which is particularly important in alignment applications where step accuracy is critical. The linear motor and high-resolution encoder system also provide excellent in-position stability.

Superior Geometry
The ultra-stiff construction and compact two-piece design result in a stage with unmatched geometrical tolerances. Straightness and flatness for the standard ALS130H is <+/-2 µm over the entire travel.

Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep cross-roller bearings for the smoothest motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the ripple-free motion required for high-precision scanning and inspection applications.

For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at smclane@aerotech.com. In addition, the ALS130H data sheet is available at http://www.aerotech.com/products/stages/als130h.html

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