Extreme UV, Directly-Deposited, Thin-Film Filter Photodiodes

Opto Diode Corporation, an ITW company, introduces two photodetectors, the AXUV100TF030 and AXUV100TF400, with 100 mm2 active areas and directly-deposited thin-film filters for extreme ultraviolet (EUV) detection. The AXUV100TF030 features typical responsivity of 0.16 A/W at 3 nm and has a detection range from 1 nm to 12 nm. The AXUV100TF400 features typical responsivity of 0.15 A/W at 40 nm with a detection range from 18 nm to 80 nm. Both devices are shipped with a temporary protective cover and have superior stability for robust operation in extreme ultraviolet environments. Operating and storage temperatures range from -10 °C to +40 °C in ambient environments and from -20 °C to +80 °C in nitrogen or vacuum environments. For more information about Opto Diode’s integrated thin films, packages, and optical filter assemblies, please contact [email protected] or visit: http://optodiode.com/photodiodes-filter.html.