Piezoelectric positioners place products precisely
Aug. 21, 2006
Novel drives allow semiconductor-related positioning systems to be developed with very high accuracy and repeatability.
Novel drives allow semiconductor-related positioning systems to be developed with very high accuracy and repeatability.
As semiconductor linewidths continue to shrink, manufacturers face the increasingly difficult task of accurately positioning and inspecting wafers. To do so requires positioning systems that maintain both high accuracy and repeatability over long travel distances. However, in many of these applications, traditional stepper and servomotors cannot be used. Instead, developers of precision motion applications and ultrafinely focused optical assemblies are turning to positioning systems based on the piezoelectric effect.
