Zygo Corp. (Middlefield, CT) has selected the Adept Technology (San Jose, CA; www.adept.com) AdeptVicron robot, standard mechanical interfaces, and mini-environment products to provide semiconductor automation hardware for wafer-handling platforms.
Zygo Corp. (Middlefield, CT) has selected the Adept Technology (San Jose, CA; www.adept.com) AdeptVicron robot, standard mechanical interfaces, and mini-environment products to provide semiconductor automation hardware for wafer-handling platforms.