APRIL 8--FiberLine from Micro-Metric Inc. (San Jose, CA;www.micro-metric.com) measures critical dimensions in the manufacture of multifiber terminators, v-grooves, ferrules, optical disks, image sensors, and other optoelectronic devices. Such critical measurements include wafer linewidths, component positioning, and optical fiber alignment with feature sizes as small as 0.5 μm. The system provides field-of-view measurement accuracy to 0.01 μm (10 nm), and point-to-point x-y-z measurement repeatability to 0.01 μm (10 nm) at 1 sigma (with an 100X objective).
FiberLine is a high-precision programmable optical coordinate-measurement machine that automatically measures dimensions on small parts. Itsx, y,and z-axis positioning components and system structural components are manufactured from cast iron and granite to achieve high accuracy and precision.
Application programs included with the FiberLine are written using Micro-Metric's Measurement Control Language. This text-based language controls all functions of the FiberLine. Program files are easy to read and allow users to modify existing programs or create their own programs to control system operation. The system's image analysis and user-interface software are also written by Micro-Metric.
