Microscope systems for materials science applications

The Scios and Helios DualBeam focused ion beam/scanning electron (FIB/SEM) microscope systems from FEI feature detection suites that provide imaging and analysis over a broad range of samples.

Content Dam Vsd Online Articles 2013 07 Scios Dualbeam Copy

The Scios and Helios DualBeam focused ion beam/scanning electron (FIB/SEM)microscope systems from FEI feature detection suites that provide imaging and analysis over a broad range of samples. Scios DualBeams are specifically positioned for 2D and 3D characterization, whereas the Helios NanoLab DualBeam adds capabilities for specialized applications like the fabrication of prototypes for nanometer-scale devices. Scios include the Trinity detector suite, which consists of three in-lens detectors designed to detect electrons of different types and energies. Helios incorporates FEI’s second-generation extreme high-resolution scanning electron microscope (XHR SEM) technology, which uses proprietary electron optical and detector technologies to deliver sub-nanometer imaging resolution over a range of accelerating voltages (0.5-30 kV). These two new DualBeams are suitable for use in materials research applications.

To Learn More:

Contact:FEI
Headquarters
: Hillsboro, Ore., United States
Product:
Scios and Helios DualBem FIB/SEM systems
Key Features:
Specifically positioned for 2D and D characterization (Scios), capabilities for specialized applications like the fabrication of prototypes for nanometer-scale devices (Helios).

What FEI says:

View a press release on the DualBeams.

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