Electron microscope uses multiple lens

The XL30 S FEG scanning electron microscope contains a Hexalens column holding a six-lens system that includes a duo-mode final lens. It allows user selection of high voltage, magnification, and working distance for material science, semiconductor, and life-science imaging applications. Operator-switching between field-free standard mode and ultrahigh-resolution immersion mode is aided by a computer-assisted automatic alignment control. The microscope also provides conventional imaging using an

Apr 1st, 1998

Electron microscope uses multiple lens

The XL30 S FEG scanning electron microscope contains a Hexalens column holding a six-lens system that includes a duo-mode final lens. It allows user selection of high voltage, magnification, and working distance for material science, semiconductor, and life-science imaging applications. Operator-switching between field-free standard mode and ultrahigh-resolution immersion mode is aided by a computer-assisted automatic alignment control. The microscope also provides conventional imaging using an Everhart-Thornley detector and immersion-mode imaging via a within-the-lens detector that can detect secondary and low-kilovolt backscattered electrons, as well as SE, BS, and EDX signal detection.

Philips Electron Optics, Bldg. AAE, POB 218, 5600 MD Eindhoven, The Netherlands; (31) 40 276 6225; Fax: (31) 40 276 658.

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