Worried about detecting nanoscale wafer defects that can compromise semiconductor quality and yield? Afraid that solutions will compromise throughput and profitability? Don’t be. Learn from the experts with this guide to next-generation high-performance inspection lighting and next-generation inspection technologies that boost sensitivity and resolution while enhancing throughput.
In Ask the Expert, you will:
•See the relationship between light source characteristics and inspection system performance
•Learn the benefits of laser light sources for semiconductor defect detection
•Understand differential interference contrast (DIC) imaging and how it’s able to detect sharp defects like scuffs, scrapes, and cracks
•Discover how polarized pupil division (PPD) technology supports the detection of gradually varying surface defects like haze and polishing marks, while maintaining a wide field of view
Download “Solving the Nanoscale Optical Inspection Challenge” today and equip your front end and back end processes to meet the nanoscale optical inspection challenge.