Stages achieve 5-nm-resolution positioning

APRIL 24, 2009--NanoTranslation (ANT95-L, ANT95-L-H) cross-roller bearing stages exhibit enhanced motion performance such as 5-g acceleration, 500-mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns that allow use in a range of configurations.

APRIL 24, 2009--NanoTranslation (ANT95-L, ANT95-L-H) cross-roller bearing stages exhibit enhanced motion performance such as 5-g acceleration, 500-mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns that allow use in a range of configurations. ANT95-L stages utilize advanced direct-drive technology to achieve positioning performance with 5-nm resolution, 50-nm repeatability, and 250-nm accuracy. The direct-drive technology is noncogging, noncontact, high speed, high resolution, and high accuracy; anticreep cross-roller bearings allows ultra-precision (5 nm) incremental moves to be accomplished reliably and repeatably. Two, three, or more axes can be combined for flexible system designs and multiaxis configurations.
Aerotech
Pittsburgh, PA, USA
www.aerotech.com

-- Posted by Carrie Meadows, Vision Systems Design, www.vision-systems.com

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PRESS RELEASE

Nanometer Accuracy AND Long Travel is a Reality
with Aerotech's ANT95-L Linear Motor Stage

Noncontact, non-cogging, frictionless direct-drive - zero backlash or hysteresis
High resolution (5 nm), repeatability (50 nm), and accuracy (250 nm)
In-position stability of 3 nm
Anti-creep cross-roller bearings
High dynamic performance
Available in X, XY, XYZ, and many other combinations

Aerotech NanoTranslation (ANT95-L, ANT95-L-H) cross-roller bearing stages combine high speed, accuracy, resolution, repeatability, and reliability into a compact package. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance such as 5 g acceleration, 500 mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns that allow the use of this flexible stage family in a wide range of configurations.

Noncontact Direct-Drive
ANT95-L stages utilize advanced direct-drive technology, pioneered by Aerotech, to achieve the highest level of positioning performance with resolution of 5 nm, repeatability of 50 nm, and accuracy of 250 nm. Aerotech direct-drive technology is non-cogging, noncontact, high speed, high resolution, and high accuracy, and the use of anti-creep cross-roller bearings allows ultra-precision (5 nm) incremental moves to be accomplished reliably and repeatably. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design
The ANT95-L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-L industry-leading 5 nm minimum incremental step size provides this high level of performance. Excellent in-position stability assisted by high-quality, anti-creep cross-roller bearings enables virtually maintenance-free operation over the life of the product. Aerotech's direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

System Control
To get the most out of your ANT95-L, Aerotech produces award-winning, high performance, single- and multi-axis motion controllers that excel in any application. The Automation 3200, Ensemble, and Soloist controllers are a perfect complement to your high-performance stage.

For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at smclane@aerotech.com. In addition, the ANT95-L series data sheet is available at http://www.aerotech.com/products/NANO/ANT95L.html.

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